GPFA-Series High Purity All-Fluoropolymer Filter Cartridges provide superior chemical compatibility, temperature range, and ultra-low extractables for the most demanding needs of the microelectronics industry. Ideal for aggressive “wet-etch and clean” applications. The PTFE membrane offers high flowrates at low pressure drop, while the PFA-440HP hardware exhibits superior chemical resistance and high temperature tolerance. Minimized ionic and TOC extractables are attained through a specialized UPW flush process. Wetpacking option is available for ease of wetting in aqueous applications. Available in the full range of micron ratings to suit all applications.
Typical Applications
Highly Reactive Chemicals
• Acetic Acid (10%)
• Hydrofluoric Acid (50%)
• Hydrogen Peroxide (30%)
• Nitric Acid (conc.)
• Phosphoric Acid (conc.)
• Sulfuric Acid (cavonc.)
• Ammonium Hydroxide (conc.)
• Potassium Hydroxide (conc.)
• Sodium Hydroxide (conc.)
• TMAH (5%)
• Aqua Regia (HNO3:HCl)
• BOE; NH4F:HF
• Mixed Acid Etch
• ChromPhos Etch
• Piranha Etch